Research
paper
2021
- M. Kubo, T. Sugahara, and M. Shimada,
"Facile fabrication of HKUST-1 thin films and free-standing MWCNT/HKUST-1 film using a spray-assisted method",
Microporous and Mesoporous Materials,
312, 110771 (2021).
2020
- D. Jiang, K. Kusdianto, M. Kubo, M. Shimada,
"Effect of Ag loading content on morphology and photocatalytic activity of Ag-TiO2 nanoparticulate films prepared via simultaneous plasma-enhanced chemical and physical vapor deposition",
Materials Research Express, 7, 116406 (2020).
-
Tomonaga, H. Izumi, T. Oyabu, B.-W. Lee, M. Kubo, M. Shimada, S. Noguchi, C. Nishida, K. Yatera, Y. Morimoto,
"Assessment of Cytokine-Induced Neutrophil Chemoattractants as Biomarkers for Prediction of Pulmonary Toxicity of Nanomaterials",
Nanomaterials, 10, 1563 (2020).
-
R.H. Lakshmipura, F. Yoshihiko, K. K, K. Masaru, S. Manabu,
"Effects of Process Conditions on the Morphology of Coating Layer Fabricated on the Surface of Carbon Nanotubes via an In-flight Coating Method",
Earozoru Kenkyu, 35, 129-134 (2020).
-
S. Zhou, M. Maeda, E. Tanabe, M. Kubo, M. Shimada,
"Bioinspired One-Step Synthesis of Pomegranate-like Silica@Gold Nanoparticles with Surface-Enhanced Raman Scattering Activity",
-
Langmuir, 36, 2553-2562 (2020).
K. Kusdianto, L.R. Hemanth, M. Kubo, M. Shimada,
"Fabrication of Hollow TiO2 Nanotubes via a Simple Gas-Phase Process Using In-Flight Coating Followed by Heat Treatment",
J. Chem. Eng. Jpn. 53, 45-48 (2020).
2019
- M. Kubo, R. Moriyama, and M. Shimada,
"Facile fabrication of HKUST-1 nanocomposites incorporating Fe3O4 and TiO2 nanoparticles by a spray-assisted synthetic process and their dye adsorption performances",
Microporous and Mesoporous Materials, 280, 227-235 (2019).
2018
- Tomonaga, H. Izumi, Y. Yoshiura, T. Myojo, T. Oyabu, B.-W. Lee, T. Okada, T. Marui, K.-Y. Wang, M. Kubo, M. Shimada,
S. Noguchi, C. Nishida, K. Yatera, Y. Morimoto, "Usefulness of myeloperoxidase as a biomarker for the ranking of pulmonary toxicity of nanomaterials",
Particle and Fibre Toxicology, 15 (5), 41 (2018).
-
K. Kusdianto, D. Jiang, M. Kubo, M. Shimada,
"Effect of annealing temperature on the photocatalytic activity of Ag-TiO2 nanocomposite films by one-step gas-phase deposition",
Mater. Res. Bull., 97, 497-505 (2018).
2017
- Kusdianto, K., Jiang, D.,
Kubo, M., and Shimada, M.; "Fabrication of TiO2?Ag nanocomposite
thin films via one-step gas-phase deposition." Ceram. Int.,
43 (6), 5351-5355 (2017).
- Kubo, M., Saito, T., and
Shimada, M.; "Evaluation of the parameters utilized for the
aerosol-assisted synthesis of HKUST-1." Microporous Mesoporous
Mater., 245, 126-132 (2017).
- Kubo, M., Taguchi, T., and
Shimada, M.; "Preparation of nanoparticle-embedded thin films by
simultaneous feeding of gaseous and solid raw materials in
plasma-enhanced chemical vapor deposition process." Thin Solid
Films, 632, 55-65 (2017).
2016
- Oyabu, T., Morimoto, Y.,
Izumi, H., Yoshiura, Y., Tomonaga, T., Lee, B.-W., Okada, T., Myojo,
T., Shimada, M., Kubo, M., Yamamoto, K., Kawaguchi, K., and Sasaki,
T.; "Comparison between whole-body inhalation and nose-only
inhalation on the deposition and health effects of nanoparticles."
Environmental Health and Preventive Medicine, 21,
42-48 (2016).
- Morimoto, Y., Izumi, H.,
Yoshiura, Y., Tomonaga, T., Lee, B.-W., Okada, T., Oyabu, T., Myojo,
T., Kawai, K., Yatera, K., Shimada, M., Kubo, M., Yamamoto, K.,
Kitajima, S., Kuroda, E., Horie, M., Kawaguchi, K., and Sasaki, T.;
"Comparison of pulmonary inflammatory responses following
intratracheal instillation and inhalation of nanoparticles."
Nanotoxicology, 10 (5), 607-618 (2016).
- Horie, M., Yoshiura, Y.,
Izumi, H., Oyabu, T., Tomonaga, T., Okada, T., Lee, B.-W., Myojo,
T., Kubo, M., Shimada, M., and Morimoto, Y.; "Comparison of the
Pulmonary Oxidative Stress Caused by Intratracheal Instillation and
Inhalation of NiO Nanoparticles when Equivalent Amounts of NiO Are
Retained in the Lung." Antioxidants, 5
(1), 4 (2016).
- Kubo, M., Kusdianto, K.,
Masuda, H., and Shimada, M.; "Fabrication of a metal oxide layer on
a multi-walled carbon nanotube surface by in-flight coating using
gas-phase deposition." Ceram. Int., 42
(7), 9162-9169 (2016).
- Morimoto, Y., Izumi, H.,
Yoshiura, Y., Tomonaga, T., Oyabu, T., Myojo, T., Kawai, K., Yatera,
K., Shimada, M., Kubo, M., Yamamoto, K., Kitajima, S., Kuroda, E.,
Kawaguchi, K., and Sasaki, T.; "Evaluation of Pulmonary Toxicity of
Zinc Oxide Nanoparticles Following Inhalation and Intratracheal
Instillation." International Journal of Molecular Sciences,
17 (8), 1241 (2016).
2015
- Kubo, M., Mantani, Y., and
Shimada, M.; "Effects of Annealing on the Morphology and Porosity of
Porous TiO2 Films Fabricated by Deposition of Aerosol
Nanoparticles." J. Chem. Eng. Jpn., 48
(4), 292-299 (2015).
- Kubo, M., Kadomura, H., and
Shimada, M.; "In-flight coating of multi-walled carbon nanotubes."
Mater. Lett., 155 (0), 114-117 (2015).
- Morimoto, Y., Izumi, H.,
Yoshiura, Y., Tomonaga, T., Oyabu, T., Myojo, T., Kawai, K., Yatera,
K., Shimada, M., Kubo, M., Yamamoto, K., Kitajima, S., Kuroda, E.,
Kawaguchi, K., and Sasaki, T.; "Pulmonary toxicity of well-dispersed
cerium oxide nanoparticles following intratracheal instillation and
inhalation." J. Nanopart. Res., 17 (11),
442 (2015).
2014
- Kubo, M., Nakaoka, A.,
Morimoto, K., Shimada, M., Horie, M., Morimoto, Y., and Sasaki, T.;
"Aerosol Generation by a Spray-Drying Technique Under Coulomb
Explosion and Rapid Evaporation for the Preparation of Aerosol
Particles for Inhalation Tests." Aerosol Sci. Technol.,
48 (7), 698-705 (2014).
2013
-
Morimoto, Y, M. Horie, N. Kobayashi, N. Shinohara and M. Shimada:
Inhalation Toxicity Assessment of Carbon-Based Nanoparticles. Acc.
Chem. Res., 46,
(3), 770?781 (2013)
- Kubo, M.; Ishihara, Y.;
Mantani, Y.; Shimada, M., Evaluation of the factors that influence
the fabrication of porous thin films by deposition of aerosol
nanoparticles. Chem. Eng. J., 232, 221-227
(2013)
2012
-
Morimoto, Y., M. Hirohashi, N. Kobayashi, A. Ogami, M. Horie, T.
Oyabu, T. Myojo, M. Hashiba, Y. Mizuguchi, T. Kambara, B. W. Lee, E.
Kuroda, M. Shimada, W. -N. Wang, K. Mizuno, K. Yamamoto, K. Fujita,
J. Nakanishi and I. Tanaka: Pulmonary Toxicity of Well-dispersed
Single-wall Carbon Nanotubes after Inhalation. Nanotoxicol., 6,
(7), 766-775 (2012).
-
Morimoto, Y., M. Hirohashi, A. Ogami, T. Oyabu, T. Myojo, M.
Todoroki, M. Yamamoto, M. Hashiba, Y. Mizuguchi, B. W. Lee, E.
Kuroda, M. Shimada, W. -N. Wang, K. Yamamoto, K. Fujita, S. Endoh,
K. Uchida, N. Kobayashi, K. Mizuno, M. Inada, H. Tao, T. Nakazato,
J. Nakanishi and I. Tanaka: Pulmonary Toxicity of Well-dispersed
Multiwall Carbon Nanotubes Following Inhalation and Intratracheal
Instillation. Nanotoxicol., 6,
(6), 587-599 (2012).
2011
-
Oyabu, T., T. Myojo, Y. Morimoto, A. Ogami, M. Hirohashi, M.
Yamamoto, M. Todoroki, Y. Mizuguchi, M. Hashiba, B. W. Lee, M.
Shimada, W. -N. Wang, K. Uchida, S. Endoh, N. Kobayashi, K.
Yamamoto, K. Fujita, K. Mizuno, M. Inada, H. Tao, T. Nakazato, J.
Nakanishi and I. Tanaka: Biopersistence of Inhaled MWCNT in Rat
Lungs in a 4-week Well-characterized Exposure. Inhal.
Toxicol., 23, (13),
784-791 (2011)
-
Ogami, A., K. Yamamoto, Y. Morimoto, K. Fujita, M. Hirohashi, T.
Oyabu, T. Myojo, K. Nishi, C. Kadoya, M. Todoroki, M. Yamamoto, M.
Murakami, M. Shimada, W. -N. Wang, N. Shinohara, S. Endoh, K.
Uchida, J. Nakanishi and I. Tanaka: Pathological Features of Rat
Lung Following Inhalation and Intratracheal Instillation of C60 Fullerene. Inhal.
Toxicol., 23,(7),
407-416 (2011)
-
Morimoto, Y., T. Oyabu, A. Ogami, T. Myojo, E. Kuroda, M. Hirohashi,
M. Shimada, W. Lenggoro, K. Okuyama and I. Tanaka: Investigation of
Gene Expression of MMP-2 and TIMP-2 mRNA in Rat Lung in Inhaled
Nickel Oxide and Titanium Dioxide Nanoparticles. Industrial
Health, 49, (3),
344-352 (2011)
-
Myojo, T., T. Oyabu, A. Ogami, M. Hirohashi, M. Murakami, M.
Yamamoto, M. Todoroki, C. Kadoya, K.
Nishi, S. Yamasaki, Y. Morimoto, I. Tanaka, M. Shimada and S. Endoh:
Monitoring of C60 Aerosol
Concentrations During 4-week Inhalation Study Using a Carbon Aerosol
Analyzer with Adjusted Analytical Protocol. J.
Nanopart. Res., 13, (5),
2063-2071 (2011)
2010
-
Shinohara, N., T. Nakazato, M. Tamura, S. Endoh, H. Fukui, Y.
Morimoto, T. Myojo, M. Shimada, K. Yamamoto, H. Tao, Y. Yoshida and
J. Nakanishi: Clearance Kinetics of Fullerene C60 Nanoparticles
from Rat Lungs after Intratracheal C60Instillation
and Inhalation C60 Exposure. Toxicol.
Sci., 118, (2),
564-573 (2010)
-
Morimoto, Y., M. Hirohashi, A. Ogami, T. Oyabu, T. Myojo, K. Nishi,
C. Kadoya, M. Todoroki, M. Yamamoto, M. Murakami, M. Shimada, W. -N.
Wang, K. Yamamoto, K. Fujita, S. Endoh, K. Uchida, N. Shinohara, J.
Nakanishi and I. Tanaka: Inflammogenic Effect of Well-characterized
Fullerenes in Inhalation and Intratracheal Instillation Studies. Part.
and Fibre Toxicol., 7:
4 (2010)
-
Shimada, M., W. -N. Wang, K. Okuyama: Synthesis of Gallium Nitride
Nanoparticles by Microwave Plasma Enhanced Chemical Vapor Deposition
Method. Chem.
Vap. Deposition, 16, (4-6),
151-156 (2010)
2009
-
Kato, H., K. Mizuno, M. Shimada, A. Nakamura, K. Takahashi, K. Hata
and S. Kinugasa: Observations of Bound Tween80 Surfactant Molecules
on Single-Walled Carbon Nanotubes in an Aqueous Solution. Carbon, 47, (15),
3434-3440 (2009)
-
Shimada, M., W. -N. Wang, K. Okuyama, T. Myojo, T. Oyabu, Y.
Morimoto, I. Tanaka, S. Endoh, K. Uchida, K. Ehara, H. Sakurai, K.
Yamamoto and J. Nakanishi: Development and Evaluation of an Aerosol
Generation and Supplying System for Inhalation Experiments of
Manufactured Nanoparticles. Environ.
Sci. Technol., 43, (14),
5529-5534 (2009)
-
Yokoyama, H., T. Ono, Y. Morimoto, T. Myojo, I. Tanaka, M. Shimada,
W. -N. Wang, S. Endo and K. Uchida: Noninvasive In Vivo Electron
Paramagnetic Resonance Study to Estimate Pulmonary Reducing Ability
in Mice Exposed to NiO or C60Nanoparticles. J.
Magnetic Resonance Imaging, 29, (6),
1432-1437 (2009)
-
Fujita, K., Y. Morimoto, A. Ogami, T. Myojyo, I. Tanaka, M. Shimada,
W. -N. Wang, S. Endoh, K. Uchida, T. Nakazato, K. Yamamoto, H.
Fukui, M. Horie, Y. Yoshida, H. Iwahashi and J. Nakanishi: Gene
Expression Profiles in Rat Lung after Inhalation Exposure to C60 Fullerene
Particles. Toxicology, 258, (1),
47-55 (2009)
2008
-
藤田克英,森本泰夫,大神 明,明星敏彦,田中勇武,島田 学,Wei-Ning
Wang,遠藤茂寿,内田邦夫,衣笠晋一,加藤晴久,高橋かより,田尾博明,稲田征治,中里哲也,山本和弘,福井浩子,堀江祐範,吉田康一,岩橋 均,中西準子: 遺伝子発現解析による工業ナノ粒子の生体影響評価. 環境毒性学会誌, 11, (2),
69-73 (2008)
-
林 豊,近藤 郁,島田 学,奥山喜久夫: PECVDプロセスにおける生成ダスト微粒子のための小型レーザ光散乱モニタリング装置の開発. エアロゾル研究, 23, (1),
36-42 (2008)
-
Hayashi, Y., M. Shimada and K. Okuyama: Influence of the Synthesis
Conditions on the Characteristics of Nanoparticles Produced in a
Nonequilibrium Plasma Field. J.
Chem. Eng. Japan, 41, (2),
62-68 (2008)
2007
-
片山和彦,三浦圭吾,島田 学,奥山喜久夫: デニューダによるたばこ主流煙の蒸発特性の測定. エアロゾル研究, 22, (4),
322-326 (2007)
-
Oyabu, T., A. Ogami, Y. Morimoto, M. Shimada, W. Lenggoro, K.
Okuyama and I. Tanaka: Biopersistence of Inhaled Nickel Oxide
Nanoparticles in Rat Lung. Inhalation
Toxicology, 19, (Supp.
1), 55-58 (2007)
-
Fisenko, S. P., W. -N. Wang, M. Shimada and K. Okuyama: Vapor
Condensation on Nanoparticles in the Mixer of a Particle Size
Magnifier. Int.
J. Heat Mass Transfer, 50, (11-12),
2333-2338 (2007)
2006
-
Kashihara, N., H. Setyawan, M. Shimada, Y. Hayashi, C. S. Kim, K.
Okuyama and S. Winardi: Suppression of Particle Generation in a
Plasma Process Using a Sine-wave Modulated rf Plasma. J.
Nanoparticle Res., 8, (3-4),
395-403 (2006)
-
Song, D. K., H. M. Lee, H. Chang, S. S. Kim, M. Shimada and K.
Okuyama: Performance Evaluation of Long Differential Mobility
Analyzer (LDMA) in Measurements of Nanoparticles. J.
Aerosol Sci., 37, (5),
598-615 (2006)
-
Kim, C. S., L. Bao, K. Okuyama, M. Shimada and H. Niinuma:
Filtration Efficiency of a Fibrous Filter for Nanoparticles. J.
Nanoparticle Res., 8, (2),
215-221 (2006)
-
Shimada, M., Y. Azuma K. Okuyama, Y. Hayashi and E. Tanabe: Plasma
Synthesis of Light Emitting Gallium Nitride Nanoparticles Using a
Novel Microwave-resonant Cavity. Jpn.
J. Appl. Phys., 45, Pt.
1, (1A), 328-332 (2006)
2005
-
Moriya, T., H. Nakayama, H. Nagaike, Y. Kobayashi, M. Shimada and K.
Okuyama: Particle Reduction and Control in Plasma Etching Equipment. IEEE
Transactions on Semiconductor Manufacturing, 18, (4),
477-486 (2005)
-
片山和彦,三浦圭吾,北尾 智,島田 学,奥山喜久夫: レーザ光散乱法によるたばこ主流煙の性状変化測定. エアロゾル研究, 20, (4),
345-351 (2005)
-
島田 学,柏原伸紀,林 豊,奥山喜久夫,横山 新,池田弥央: 新規変調プラズマによるSiH4/H2プラズマCVDリアクター内のダスト微粒子の抑制. エアロゾル研究, 20, (3),
231-237 (2005)
-
中島啓之,本田重夫,島田 学,奥山喜久夫: QCMによるケミカルエアフィルタの寿命判定手法の検討. エアロゾル研究, 20,(3),
220-224 (2005)
-
Azuma, Y., M. Shimada and K. Okuyama: The Influence of the Synthetic
Conditions of Chemical Vapor Synthesis on the Size of Gallium
Nitride Nanoparticles. J.
Chem. Eng. Japan, 38, (7),
516-519 (2005)
-
Lee, H. M., C. S. Kim, M. Shimada and K. Okuyama: Effects of
Mobility Change and Distribution of Bipolar Ions on Aerosol
Nanoparticle Diffusion Charging. J.
Chem. Eng. Japan, 38, (7),
486-496 (2005)
-
Moriya, T., M. Shimada, K. Okuyama and H. Setyawan: Observation of
Heat-Induced Particle Re-suspension and Transport in a Vacuum
Chamber. Jpn.
J. Appl. Phys., 44, (7A),
4871-4877 (2005)
-
Shimada, M., H. Setyawan, Y. Hayashi, N. Kashihara, K. Okuyama and
S. Winardi: Incorporation of Dust Particles into a Growing Film
during Silicon Dioxide Deposition from a TEOS/O2 Plasma. Aerosol
Sci. Technol., 39, (5),
408-414 (2005)
-
Park, S. H., K. W. Lee, M. Shimada and K. Okuyama: Coagulation of
Bipolarly Charged Ultrafine Aerosol Particles. J.
Aerosol Sci., 36, (7),
830-845 (2005)
-
Lee, H. M., M. Shimada, C. S. Kim and K. Okuyama: Bipolar Diffusion
Charging for Aerosol Nanoparticle Measurement Using a Soft X-ray
Charger. J.
Aerosol Sci., 36, (7),
813-829 (2005)
-
Setyawan, H., M. Shimada, Y. Hayashi and K. Okuyama: Removal of
Particles during Plasma Processes Using a Collector based on the
Properties of Particles Suspended in the Plasma. J.
Vac. Sci. Tech. A, 23, (3),
388-393 (2005)
-
Setyawan, H., M. Shimada, Y. Hayashi, K. Okuyama and S. Winardi:
Modeling of and Experiments on Dust Particle Levitation in the
Sheath of a Radio Frequency Plasma Reactor. J.
Appl. Phys., 97, (4),
043306-1-6 (2005)
-
Habuka, H., K. Suzuki, S. Okamura, M. Shimada and K. Okuyama: Quartz
Crystal Microbalance for Silicon Surface Organic Contamination. J.
Electrochem. Soc., 152, (4),
G241-G245 (2005)
-
Shimada, M., H. M. Lee, C. S. Kim, H. Koyama, T. Myojo and K.
Okuyama: Development of an LDMA-FCE System for the Measurement of
Submicron Aerosol Particles. J.
Chem. Eng. Japan, 38, (1),
34-44 (2005)
-
林 豊,島田 学,Heru
Setyawan,奥山喜久夫,柏原伸紀: PECVD成膜装置内での粒子汚染現象に対する操作流量の影響.粉体工学会誌, 42, (2),
105-109 (2005)
-
Kim, C. S., K. Nakaso, B. Xia, K. Okuyama and M. Shimada: A New
Observation on the Phase Transformation of TiO2Nanoparticles
Produced by a CVD Method. Aerosol
Sci. Technol., 39, (2),
104-112 (2005)
2004
-
Kim, C. S., K. Okuyama, K. Nakaso and M. Shimada: Direct Measurement
of Nucleation and Growth Modes in Titania Nanoparticles Generation
by a CVD Method. J.
Chem. Eng. Japan, 37, (11),
1379-1389 (2004)
-
Moriya, T., H. Nagaike, K. Denpoh, T. Morimoto, M. Aomori, S.
Kawaguchi, M. Shimada and K. Okuyama: Observation
and Evaluation of Flaked Particle Behavior in Magnetically Enhanced
Reactive Ion Etching Equipment Using Dipole Ring Magnet. J.
Vac. Sci. Technol. B, 22, (4),
1688-1693 (2004)
-
Okamura, S., M. Shimada and K. Okuyama: Observation of Adsorption
Phenomena of Dibutyl Phthalate Molecules on Si Surface Using Quartz
Crystal Microbalance Method. Jpn.
J. Appl. Phys., 43, (8A),
5496-5500 (2004)
-
Okamura, S., M. Shimada and K. Okuyama: Simultaneous Observation of
Molecular Contamination Behavior in Semiconductor Clean Room Using
Quartz Crystal Microbalance. Jpn.
J. Appl. Phys., 43, (7A),
4135-4140 (2004)
-
Itoh, Y., T.
O. Kim, M. Shimada, K. Okuyama and I. Matsui: One-step
Preparation of BaTiO3 Nanoparticles
by Liquid Source Chemical Vapor Deposition. J.
Chem. Eng. Japan, 37, (3),
454-460 (2004)
-
Okamura, S., M. Shimada and K. Okuyama: Adsorption
and Desorption of Dibutyl Phthalate on Si Surface Measured in
Controlled Atmosphere Using Quartz Crystal Microbalance Method. Jpn.
J. Appl. Phys., 43, (5A),
2661-2666 (2004)
-
片山和彦,北尾 智,島田 学,奥山喜久夫: 2次元偏光レーザ光散乱法によるたばこ副流煙の測定. エアロゾル研究, 19, (1),
50-57 (2004)
-
Setyawan, H., M. Shimada, Y. Hayashi, K. Okuyama and S. Yokoyama: Particle
Formation and Trapping Behavior in a TEOS/O2 Plasma
and Their Effects on Contamination of a Si Wafer. Aerosol
Sci. Technol., 38, (2),
120-127 (2004)
-
Azuma, Y., M. Shimada and K. Okuyama: The
Synthesis of Monodisperse Ultrapure Gallium Nitride Nanoparticles by
MOCVD. Chem.
Vap. Deposition, 10, (1),
11-13 (2004)
2003
-
Nakaso, K., K. Okuyama, M. Shimada and S. E. Pratsinis: Effect
of Reaction Temperature on CVD-made TiO2 Primary
Particle Diameter. Chem.
Engng. Sci., 58, (15),
3327-3335 (2003)
-
近藤 郁,今城祐二,島田 学,奥山喜久夫: プラズマプロセス中でのダスト粒子の捕捉挙動の吸引法による計測. 化学工学論文集, 29, (4),
513-520 (2003)
-
Setyawan, H., M. Shimada, Y. Imajo, Y. Hayashi and K. Okuyama: Characterization
of Particle Contamination in Process Steps during Plasma-Enhanced
Chemical Vapor Deposition Operation. J.
Aerosol Sci., 34, (7),
923-936 (2003)
-
Han, B., M. Shimada, K. Okuyama and M. Choi: Classification
of Monodisperse Aerosol Particles Using an Adjustable Soft X-ray
Charger. Powder
Tech., 135-136, 336-344
(2003)
-
本田重夫,島田 学,奥山喜久夫: クリーンルームの有機化合物発生量に対する空調温度と高濃度トルエン暴露の影響. 空気調和・衛生工学会論文集, 89, 11-17
(2003)
-
Habuka, H., Y. Shimazaki, S. Okamura, F. Sugimoto, T. Takeuchi, M.
Aihara, M. Shimada and K. Okuyama: Time-Dependent
Airborne Organic Contamination on Silicon Wafer Surface Stored in a
Plastic Box. Jpn.
J. Appl. Phys., 42, Part
1, (4A) 1575-1580 (2003)
-
Han, B., M. Shimada, M. Choi and K. Okuyama: Unipolar
Charging of Nanosized Aerosol Particles Using Soft X-ray
Photoionization. Aerosol
Sci. Technol., 37, (4),
330-341 (2003)
-
Habuka, H., S. Ishiwari, H. Kato, M. Shimada and K. Okuyama: Airborne
Organic Contamination Behavior on Silicon Wafer Surface. J.
Electrochem. Soc., 150, (2),
G148-G154 (2003)
2002
-
島田 学,奥山喜久夫,本田重夫,羽深 等: ガス状有機汚染物質の壁面付着量の実時間計測と付着挙動の評価. 空気清浄,40, (4),
275-281 (2002)
-
近藤 郁,今城祐二,島田 学,奥山喜久夫: 半導体材料ガス中に浮遊する微粒子の光散乱法による検出. 粉体工学会誌,39, (11),
806-812 (2002)
-
Park, S. H., K. W. Lee, M. Shimada and K. Okuyama: Change
in Particle Size Distribution of Aerosol Undergoing Condensational
Growth: Alternative
Analytical Solution for the Low Knudsen Number Regime. J.
Aerosol Sci., 33, (9),
1297-1307 (2002)
-
Setyawan, H., M. Shimada and K. Okuyama: Characterization
of Fine Particle Trapping in a Plasma-Enhanced Chemical Vapor
Deposition Reactor. J.
Appl. Phys., 92, (9),
5525-5531 (2002)
-
Shimada, M., B. Han, K. Okuyama and Y. Otani: Bipolar
Charging of Aerosol Nanoparticles by a Soft X-ray Photoionizer.J.
Chem. Eng. Japan, 35, (8),
786-793 (2002)
-
Kim, C. -S., K. Okuyama and M. Shimada: Performance
of a Mixing Type CNC for Nanoparticles at Low Pressure Conditions. J.
Aerosol Sci., 33, (10),
1389-1404 (2002)
-
Nakaso, K., M. Shimada, K. Okuyama and K. Deppert: Evaluation
of the Change in the Morphology of Gold Nanoparticles during
Sintering. J.
Aerosol Sci., 33, (7),
1061-1074 (2002)
-
Setyawan, H., M. Shimada, K. Ohtsuka and K. Okuyama: Visualization
and Numerical Simulation of Fine Particle Transport in a
Low-pressure Parallel Plate Chemical Vapor Deposition Reactor. Chem.
Engng. Sci., 57, (3),
497-506 (2002)
2001
-
Iskandar, F., I. W. Lenggoro, T. O. Kim, N. Nakao, M. Shimada and K.
Okuyama: Fabrication and Characterization of SiO2Particles
Generated by Spray Method for Standards Aerosol. J.
Chem. Eng. Japan, 34, (10),
1285-1292 (2001)
-
Habuka, H., M. Shimada and K. Okuyama: Adsorption and Desorption
Rate of Multicomponent Organic Species on Silicon Wafer Surface. J.
Electrochem. Soc., 148, (7),
G365-G369 (2001)
-
Shimada, M., H. -K. Chang, Y. Fujishige and K. Okuyama: Calibration
of Polarization-Sensitive and Dual-Angle Laser Light Scattering
Methods Using Standard Latex Particles. J.
Colloid Interface Sci., 241, 71-80 (2001)
-
Nakaso, K., T. Fujimoto, T. Seto, M. Shimada, K. Okuyama and M. M.
Lunden: Size Distribution Change of Titania Nano-Particle
Agglomerates Generated by Gas Phase Reaction, Agglomeration and
Sintering. Aerosol
Sci. Technol., 35, (5),
929-947 (2001)
-
Habuka, H., T. Otsuka, W. -F. Qu, M. Shimada and K. Okuyama: Model
of Boron Incorporation into Silicon Epitaxial Film in a B2H6-SiHCl3-H2 System. J.
Crystal Growth, 222, (1-2),
183-193 (2001)
-
Park, S. H., K. W. Lee, M. Shimada and K. Okuyama: Alternative
Analytical Solution to Condensational Growth of Polydisperse
Aerosols in the Continuum Regime. J.
Aerosol Sci., 32, (2),
187-197 (2001)
~2000
-
Fujimoto, T., K. Okuyama, M. Shimada, Y. Fujishige, M. Adachi and I.
Matsui: Particle Generation and Thin Film Surface Morphology in
Tetraethylorthosilicate/Oxygen Plasma Enhanced Chemical Vapor
Deposition Process. J.
Appl. Phys., 88, (5),
3047-3052 (2000)
-
Habuka, H., M. Shimada and K. Okuyama: Thermal Conditions in Rapid
Thermal Processing System Using Circular Infrared Lamp. J.
Electrochem. Soc., 147, (12),
4660-4664 (2000)
-
島田 学,奥山喜久夫,Heru
Setyawan,家近 泰,前田尚良: 垂直型MOCVD反応器におけるGaN薄膜の成膜速度分布に及ぼす圧力と流量の影響. 化学工学論文集, 26, (6),
804-810 (2000)
-
羽深 等,島田 学,奥山喜久夫: 環状赤外線放射加熱炉における加熱分布の数値解析. 化学工学論文集, 26, (6),
785-791 (2000)
-
大鹿高歳,西山昭雄,伊藤佳史,中曽浩一,島田 学:
CVD-Al2O3反応におけるH2S添加効果に関する研究. 化学工学論文集,26, (6),
749-753 (2000)
-
Habuka, H., M. Shimada and K. Okuyama: Rate Theory of Multicomponent
Adsorption of Organic Species on Silicon Wafer Surface. J.
Electrochem. Soc., 147, (6),
2319-2323 (2000)
-
浅井琢也,島田 学,奥山喜久夫,金泰吾,小松原 誠:
DMA内部の粒子濃度の偏りに及ぼす構造と操作条件のシミュレーションによる検討. エアロゾル研究, 14, (2),
145-153 (1999)
-
Habuka, H., Y. Aoyama, S. Akiyama, T. Otsuka, W. -F. Qu, M. Shimada
and K. Okuyama: Chemical Process of Silicon Epitaxial Growth in a
SiHCl3-H2 System. J.
Crystal Growth, 207, (1/2),
77-86 (1999)
-
Habuka, H., T. Otsuka, M. Mayusumi, M. Shimada and K. Okuyama: A
Direct Approach for Evaluating the Thermal Condition of a Silicon
Substrate under Infrared Rays and Specular Reflectors. J.
Electrochem. Soc., 146, (2),
713-718 (1999)
-
Shimada, M., K. Okuyama, Y. Inoue, M. Adachi and T. Fujii: Removal
of Airborne Particles by a Device Using UV/Photoelectron Method
under Reduced Pressure Conditions. J.
Aerosol Sci., 30, (3),
341-353 (1999)
-
Ohshika, T., A. Nishiyama, K. Nakaso, M. Shimada and K. Okuyama: Unveiling
the Magic of H2S on
the CVD-Al2O3Coating. Journal
de Physique IV, 9, (P8),
Pt. 2, 877-883 (1999)
-
Shimada, M., K. Okuyama, M. Adachi and T. Fujii: Aerosol
Particle Removal at Reduced Pressure by an Electrical Precipitator
Using UV/Photoelectron Method. J.
Aerosol Sci., 29, (S1),
S1237-S1238 (1998)
-
Okuyama, K., M. Shimada, T. Fujimoto, T. Maekawa, K. Nakaso and T.
Seto: Effects
of Preparation Conditions on the Characteristics of Titanium Dioxide
Particles Produced by a CVD Method. J.
Aerosol Sci., 29, (S1),
S907-S908 (1998)
-
Okuyama, K., M. Shimada, M., A. Okita, Y. Otani and S. J. Cho:
Performance Evaluation of Cluster-DMA with Integrated Electrometer
and Its Application to Ion Mobility Measurements. J.
Aerosol Res., Japan, 13, (2),
83-93 (1998)
-
長迫 透,島田 学,片山和彦,奥山喜久夫: 管型反応器における溶媒を添加したスチレン重合反応の実験およびシミュレーションによる評価. 化学工学論文集, 23, (6),
796-803 (1997)
-
羽深 等,片山正健,島田 学,奥山喜久夫: シリコンエピタキシャル成長におけるドーパントガスの輸送現象解析. 化学工学論文集, 23, (6),
772-779 (1997)
-
Seto, T., A. Hirota, T. Fujimoto, M. Shimada and K. Okuyama:
Sintering of Polydisperse Nanometer-Sized Agglomerates.Aerosol
Sci. Technol., 27, (3),
422-438 (1997)
-
Habuka, H., M. Katayama, M. Shimada and K. Okuyama: Nonlinear
Increase in Silicon Epitaxial Growth Rate in a SiHCl3-H2System
under Atmospheric Pressure. J.
Cryst. Growth, 182, (3/4),
352-362 (1997)
-
島田 学,浅井琢也,奥山喜久夫,松倉正雄: 容器内の層流および乱流の流れ場における粒子状・ガス状物質の輸送現象の実験と計算による検討. エアロゾル研究, 12, (4),
301-310 (1997)
-
Shimada, M., S. J. Cho, K. Okuyama, T. Tamura, M. Adachi and T.
Fujii: Removal of Aerosol Particles by a Tubular Particle-Removal
Device Using UV/ Photoelectron Method. J.
Aerosol Sci., 28, (4),
649-661 (1997)
-
Nagasako, T., M. Shimada, K. Katayama and K. Okuyama: Numerical
Simulation and Experiment of an Unsteady Thermal Polymerization
Process of Styrene in a Laminar Tubular Reactor. Thermal
Science and Engineering, 4, (4),
11-20 (1996)
-
長迫 透,島田 学,奥山喜久夫: 層流管型反応器におけるスチレン熱重合反応の測定と解析. 化学工学論文集, 22, (4),
907-915 (1996)
-
羽深 等,片山正健,島田 学,奥山喜久夫: 輸送現象と表面反応を考慮したSiHCl3-H2系Siエピタキシャル成長の三次元数値解析. 日本結晶成長学会誌, 23, (1),
2-7 (1996)
-
Habuka, H., T. Nagoya, M. Mayusumi, M. Katayama, M. Shimada and K.
Okuyama: Model on Transport Phenomena and Epitaxial Growth of
Silicon Thin Film in SiHCl3-H2 System
under Atmospheric Pressure. J.
Cryst. Growth, 169, (1),
61-72 (1996)
-
Shimada, M., K. Okuyama, S. Okazaki, T. Asai, M. Matsukura and Y.
Ishizu: Numerical Simulation and Experiment on the Transport of Fine
Particles in a Ventilated Room. Aerosol
Sci. Technol., 25, (3),
242-255 (1996)
-
Habuka, H., T. Nagoya, M. Katayama, M. Shimada and K. Okuyama:
Modeling of Epitaxial Silicon Thin-Film Growth on a Rotating
Substrate in a Horizontal Single-Wafer Reactor. J.
Electrochem. Soc., 142, (12),
4272-4278 (1995)
-
Shimada, M., T. Asai, S. Okazaki, K. Okuyama and H. Shinagawa:
Experiment and Numerical Simulation on the Behavior of Particulate
and Gaseous Matters in Chamber Flow. J.
Aerosol Res., Japan, 10, (3),
204-213 (1995)
-
Seto, T., M. Shimada and K. Okuyama: Evaluation of Sintering of
Nanometer-sized Titania Using Aerosol Method. Aerosol
Sci. Technol., 23, (2),
183-200 (1995)
-
Shimada, M., T. Seto and K. Okuyama: Size Change of Very Fine Silver
Agglomerates by Sintering in a Heated Flow. J.
Chem. Eng. Japan, 27, (6),
795-802 (1994)
-
Habuka, H., M. Katayama, M. Shimada and K. Okuyama: Numerical
Evaluation of Silicon-Thin Film Growth by SiHCl3-H2Gas
Mixture in a Horizontal Chemical Vapor Deposition Reactor. Jpn.
J. Appl. Phys., 33, Pt.
1, (4A), 1977-1985 (1994)
-
Adachi, M., K. Okuyama, N. Tohge, M. Shimada, J. Sato and M.
Muroyama: Precursors in Atmospheric-Pressure Chemical Vapor
Deposition of Silica Films from Tetraethylorthosilicate/Ozone
System. Jpn.
J. Appl. Phys. Lett., 33, Pt.
2, (3B), L447-L450 (1994)
-
Okuyama, K., T. Seto, M. Shimada and N. Tohge: Size-Dependence of
Properties of Superconducting Bi-Ca-Sr-Cu-O Fine Particles Prepared
by Spray-Pyrolysis Method. J.
Materials Sci.: Materials in Electronics, 5, (4),
210-214 (1994)
-
Shimada, M., T. Seto and K. Okuyama: Wall Deposition of Ultrafine
Aerosol Particles by Thermophoresis in Nonisothermal Laminar Pipe
Flow of Different Carrier Gas. Jpn.
J. Appl. Phys., 33, Pt.
1, (2), 1174-1181 (1994)
-
Shimada, M., T. Seto and K. Okuyama: Thermophoretic and
Evaporational Losses of Ultrafine Particles in Heated Flow.AIChE
J., 39, (11),
1859-1869 (1993)
-
Adachi, M., K. Okuyama, N. Tohge, M. Shimada, J. Satoh and M.
Muroyama: Particle Generation and Film Formation in an
Atmospheric-Pressure CVD Reactor Using the Tetraethylorthosilicate
(TEOS)/He, TEOS/O2/He,
and TEOS/O3/He
Systems.Jpn. J. Appl. Phys.
Lett., 32, Pt.
2, (5B), L748-L751 (1993)
-
Okuyama, K., M. Shimada, M. Adachi and N. Tohge: Preparation of
Ultrafine Superconductive Bi-Ca-Sr-Cu-O Particles by Metal-organic
Chemical Vapor Deposition. J.
Aerosol Sci., 24, (3),
357-366 (1993)
-
Shimada, M., K. Okuyama and M. Asai: Deposition of Submicron Aerosol
Particles in Turbulent and Transitional Flow.AIChE
J., 39, (1),
17-26 (1993)
-
Adachi, M., K. Okuyama, N. Tohge, M. Shimada, J. Satoh and M.
Muroyama: Gas-Phase Nucleation in an Atmospheric Pressure CVD
Process for SiO2 Films
Using Tetraethylorthosilicate (TEOS). Jpn.
J. Appl. Phys. Lett., 31, Pt.
2, (10A), L1439-L1442 (1992)
-
Shimada, M. and K. Okuyama: The Effect of Electrically Charged
Dielectric Walls on the Diffusive Deposition of Submicron Aerosol
Particles. J.
Aerosol Sci., 23, (7),
711-721 (1992)
-
奥山喜久夫,島田 学,峠 登,足立元明: 噴霧熱分解法によるビスマス系酸化物超伝導微粒子の焼結特性. 粉砕, 36, 20-29
(1992)
-
Shimada, M. and K. Okuyama: Diffusive Deposition of Submicrometer
Aerosol Particles onto Dielectric Walls with a Nonuniform Surface
Charge Distribution. J.
Colloid Interface Sci., 154, (1),
255-263 (1992)
-
山下礼二,島田 学,植林信一: 気中浮遊粒子の沈着に及ぼす静電気力の影響の評価. 空気調和・衛生工学会論文集, 45,13-18
(1991)
-
Shimada, M., K. Okuyama, Y. Kousaka and D. Minamino: Experimental
Study of Aerosol Deposition in Stirred Flow Fields Ranging from
Laminar to Turbulent Flows. J.
Chem. Eng. Japan, 24, (2),
203-209 (1991)
-
Kousaka, Y., K. Okuyama, M. Shimada and Y. Takii: Development
of a Method for Testing Very High Efficiency Membrane Filters for
Ultrafine Aerosol Particles. J.
Chem. Eng. Japan, 23, (5),
568-574 (1990)
-
Kousaka, Y., K. Okuyama, M. Shimada, K. Ohshima and T. Hase:
Performance of a Nebulizer for Standard Aerosol Particle Generation. J.
Aerosol Res. Japan, 4, (4),
294-302 (1989)
-
Shimada, M., K. Okuyama and Y. Kousaka: Influence of Particle
Inertia on Aerosol Deposition in a Stirred Turbulent Flow Field. J.
Aerosol Sci., 20, (4),
419-429 (1989)
-
Shimada, M., K. Okuyama, Y. Kousaka, Y. Okuyama and J. H. Seinfeld:
Enhancement of Brownian and Turbulent Diffusive Deposition of
Charged Aerosol Particles in the Presence of an Electric Field. J.
Colloid Interface Sci., 128, (1),
157-168 (1989)
-
Shimada, M., K. Okuyama, Y. Kousaka and J. H. Seinfeld: A Model
Calculation of Particle Deposition onto a Rough Wall by Brownian and
Turbulent Diffusion. J.
Colloid Interface Sci., 125, (1),
198-211 (1988)
-
Kousaka, Y., K. Okuyama, M. Shimada and K. Ohshima: A Precise Method
to Determine the Diameter of Airborne Polystyrene Latex Particles. J.
Aerosol Sci., 19, (4),
501-509 (1988)
-
Shimada, M., K. Okuyama, Y. Kousaka and K. Ohshima: Turbulent and
Brownian Diffusive Deposition of Aerosol Particles onto a Rough
Wall. J.
Chem. Eng. Japan, 20, (1),
57-64 (1987)